Precision Ceramic Robotic Arms and Fingers with Thermal Stability and Dimensional Precision for Semiconductor Wafer Handling

Advanced Ceramic Solutions for Semiconductor Automation

Our high-performance ceramic robotic arms, claws, and fingers are engineered specifically for sensitive semiconductor wafer handling applications. These critical components function as the robot's "hand" - requiring exceptional thermal stability, dimensional precision, and contamination-free operation to maintain process integrity in semiconductor manufacturing environments.

Critical Performance Requirements for Wafer Handling Components

• Ultra-Low Contamination: Certified cleanroom-compatible materials that prevent particle generation and chemical contamination

• Exceptional Thermal Stability: Maintain dimensional integrity across extreme temperature fluctuations

• Superior Mechanical Properties: High stiffness-to-weight ratio for precise positioning and vibration damping

• Chemical Inertness: Resistant to aggressive process chemicals including acids, bases and plasma environments

Advanced Manufacturing Capabilities

Multiple Forming Technologies

We employ diverse advanced forming processes to match your specific application requirements:

• Hot Pressing: For maximum density and superior mechanical properties

• Cold Isostatic Pressing (CIP): Ensuring uniform density in complex geometries

• Gel Casting: Ideal for large, complex shapes with excellent surface finish

• Dry Pressing: Cost-effective for high-volume production of simpler geometries

Technical Specifications & Size Capabilities

• Maximum Dimensions: Up to 650mm in diameter or 4 meters in length

• Porosity Levels: Engineered for very low to zero porosity depending on application

• Net-Shape Sintering: Direct sintering technology minimizes post-processing

• Surface Quality: Optical-grade finishes available for critical applications

Comprehensive Semiconductor Component Portfolio

Our precision ceramic manufacturing capabilities extend beyond robotic end-effectors to include:

• Wafer Processing Components: Gas distribution plates, shower heads, and cover plates

• Process Chamber Parts: RF windows, dome assemblies, and chamber liners

• Structural Elements: Precision substrates, insulating components, and spacer rings

• Specialized Fixtures: Nozzles, brackets, and custom mounting solutions

Material Advantages for Semiconductor Applications

Ultra-Clean Operation

• Particle-free performance during extended operational cycles

• Minimal outgassing under vacuum and high-temperature conditions

• Non-contaminating material composition compatible with sensitive processes

Engineering Excellence

• Exceptional flatness and parallelism for precise wafer positioning

• Superior wear resistance for extended service life in abrasive environments

• Customizable geometry with tight tolerances for direct system integration

Industry Applications & Integration

Our ceramic components serve critical functions across semiconductor manufacturing:

• Wafer transfer robots and automated material handling systems

• Etch and deposition process chambers

• Lithography equipment and metrology systems

• Vacuum and ultra-high vacuum applications

• CVD and PVD system components

Why Choose Our Ceramic Wafer Handling Solutions?

With specialized expertise in advanced technical ceramics for semiconductor equipment, we provide:

• Application-specific material selection guidance

• Custom engineering support for unique design challenges

• Rapid prototyping capabilities for development cycles

• Volume manufacturing with consistent quality assurance

• Technical documentation and performance validation data

Contact our engineering team to discuss your specific wafer handling requirements and discover how our precision ceramic arms, claws, and fingers can enhance your semiconductor manufacturing process reliability and yield.

Founded in 2017, Kegu is a leading advanced materials developer based in China’s Xixian New District, Qinhan New City—strategically positioned near major transport links including the Xianyang East Expressway. With a registered capital of 35.5 million RMB (approx. 5 million USD), we operate from a modern 5-acre production facility where we combine materials science innovation with precision manufacturing.

We specialize in engineering high-performance ceramic components for mission-critical industries such as New Energy, Chemical Processing, Pharmaceuticals, and Aerospace. Our products are known for exceptional thermal stability, excellent chemical resistance, and outstanding mechanical properties.

Leveraging a strong R&D foundation, we deliver customized ceramic solutions that meet stringent international quality standards while enhancing operational performance and reducing lifecycle costs for OEMs and innovators worldwide. At Kegu, we’re solving tomorrow’s material challenges—today.